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SU8 - Negative epoxy resist chemically
amplified
Utilization : MEMS, UV-LIGA, LCD screen,
MR & GMR heads, MCM modules
| SU8 |
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- Economical, near UV sensitivity from 350 to 400 nm,
- From 2 to 500 µm coating thickness with a simple conventional
spin coating machine,
- Vertical side wall profiles,
- Resistant to alkaline etchant and gold plating chemistry,
- Excellent dry-etch resistance,
- High chemical resistance,
- High thermal resistance : up to 200 °C,
- Compatible with safer solvent based developers in immersion or in
spray,
- 55 °C Tg.
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| SU8-2000 |
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- New version,
- Faster drying,
- Better adhesion,
- Better coating uniformity,
- From 1 to 500 microns coating thickness.
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| Developer |
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Other products available : Remover PG, Acryl
Strip, EBR PG
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